Measuring OLED dimensions

The Organic EL Display (OLED) used smart phones and TV is distinctive for its vivid image and ultrathin size. Special attention to dimension measurements during the evaporation process of the organic emitting layer production process are crucial to that high picture quality. Sinto’s products have put this technology to many uses from its development and trial phase to the mass production phase, and are now releasing new products in keeping with the development of OLED technology.

Measurement of the metal mask used in evaporation

Fine metal masks (FMM) are used in the process of per-pixel deposition of RGB three-color organic light-emitting layers on the LTPS panel, which is the backplane (drive circuit substrate) of OLED displays, performed using vacuum deposition equipment. These FMM are key components that are the decisive factor in achieving high definition in OLED displays.
After it has been used a certain number of times, the metal mask must be cleaned before it can be used in the evaporation process again, so measurements must be taken after cleaning as well to check for changes in dimensions. The metal mask manufacturers also measure it before shipping.

Measurement Outline

The fine metal mask’s aperture and rib dimensions, overall length and position displacement (distortion) of the evaporation area, and the amount of surface bend, are all measured. In order to accurately measure the heavy metal mask, an extremely rigid measurement table is used to curb deformation of the fine metal mask during installation.

In addition to FMM for per-pixel deposition layer coating, our equipment also supports measurement of aperture position and aperture size of open masks for common layer and encapsulation layer deposition.

Related products

Models Supporting OLED vapor deposition Metal Mask Measurement

Automatic 2D/3D CMM
OMIC Series

LTPS panel measurements

The LTPS panel used in a Liquid Crystal Display is also used in the organic EL panel’s backplane (circuit board). During production of the LTPS panel, the total pitch and CD/overlay series are measured by SMIC Series and μ-Master Series.