Measurement MEMS(Micro Electro Mechanical Systems)
MEMS (micro-electromechanical systems), or micro machines, are ultra-compact devices in which mechanical components and electronic circuits are integrated on to silicon or glass substrates, or organic materials, using micromachining technology. This technology has been applied to new devices such as inkjet printer heads and gyro/accelerometer sensors.
One of the MEMS manufacturing processes is surface micromachining, which uses semiconductor manufacturing technology to process thin films. Sinto's equipment is used to measure the precision photomasks used to form patterns in this photolithography process.
Measurement Outline
MEMS Photomasks
Our equipment measures the position coordinates, line width, and diameter of the patterns on the photomask. Patterns are about 3 to 5 µm in size, with the finest less than 1 µm, and high-resolution microscopy and image processing techniques make such measurements possible. In addition, we can flexibly support free-form patterns, which are a feature of masks for MEMS.
Please consult us for inquiries.
+81-52-581-6896
Available hours: 9:00-12:00 and 13:00-17:00 JST, Monday through Friday
(excluding national and corporate holidays)
